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It was a question regarding off-axis illumination and explaining how off-axis illumination allows for higher resolution, and what, beyond the off-axis illumination, is needed to achieve the higher resolution.
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Senior Process Technologist

Interviewed at Crocus Technology

4.2
Jul 2, 2012

It was a question regarding off-axis illumination and explaining how off-axis illumination allows for higher resolution, and what, beyond the off-axis illumination, is needed to achieve the higher resolution.

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