ASM employees working as Senior Field Process Engineer in US have attributed a compensation and benefits rating of 5 out of 5 stars, based on 1 ratings. This is 9% higher than the average of Senior Field Process Engineer professionals at ASM worldwide.
The salary trajectory of a Senior Field Process Engineer ranges between locations and employers. The salary starts at $117,783 per year (estimate) and goes up to $237,944 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Field Process Engineer at ASM is $136,900 per year or $66 per hour, but some professionals have reported earning up to roughly $220,151 per year (90th percentile). The typical pay range is between $107,546 (25th percentile) and $176,489 (75th percentile) annually. This is based on 10 salaries submitted by ASM Senior Field Process Engineer professionals on Glassdoor, as of Jul 2026.
Senior Field Process Engineer professionals typically earn between $52 and $85 per hour.
Senior Field Process Engineer professionals typically earn between $8,962 and $14,707 monthly.