ASM employees working as Senior Process Engineer I in US have attributed a compensation and benefits rating of 3.8 out of 5 stars, based on 26 ratings. This is 6% higher than the average of Senior Process Engineer I professionals at ASM worldwide.
The salary trajectory of a Senior Process Engineer I ranges between locations and employers. The salary starts at $117,882 per year (estimate) and goes up to $238,049 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Process Engineer I at ASM is $138,533 per year or $67 per hour, but some professionals have reported earning up to roughly $195,032 per year (90th percentile). The typical pay range is between $117,048 (25th percentile) and $166,135 (75th percentile) annually. This is based on 81 salaries submitted by ASM Senior Process Engineer I professionals on Glassdoor, as of Jul 2026.
Senior Process Engineer I professionals typically earn between $56 and $80 per hour.
Senior Process Engineer I professionals typically earn between $9,754 and $13,845 monthly.
