ASM employees working as Sr Process Engineer in US have attributed a compensation and benefits rating of 3.2 out of 5 stars, based on 26 ratings. This is 3% lower than the average of Sr Process Engineer professionals at ASM worldwide.
The salary trajectory of a Sr Process Engineer ranges between locations and employers. The salary starts at $117,768 per year (estimate) and goes up to $237,929 per year (estimate) for the highest level of seniority.
The estimated average salary for a Sr Process Engineer at ASM is $169,883 per year or $82 per hour, but some professionals have reported earning up to roughly $256,328 per year (90th percentile). The typical pay range is between $138,157 (25th percentile) and $211,562 (75th percentile) annually. This is based on 4 salaries submitted by ASM Sr Process Engineer professionals on Glassdoor, as of Jul 2026.
Sr Process Engineer professionals typically earn between $66 and $102 per hour.
Sr Process Engineer professionals typically earn between $11,513 and $17,630 monthly.