ASML employees working as Senior Engineer in US have attributed a compensation and benefits rating of 3.2 out of 5 stars, based on 11 ratings. This is 9% lower than the average of Senior Engineer professionals at ASML worldwide.
The salary trajectory of a Senior Engineer ranges between locations and employers. The salary starts at $94,362 per year (estimate) and goes up to $378,731 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Engineer at ASML is $184,589 per year or $89 per hour, but some professionals have reported earning up to roughly $276,849 per year (90th percentile). The typical pay range is between $150,684 (25th percentile) and $229,149 (75th percentile) annually. This is based on 48 salaries submitted by ASML Senior Engineer professionals on Glassdoor, as of Jul 2026.
Senior Engineer professionals typically earn between $72 and $110 per hour.
Senior Engineer professionals typically earn between $12,557 and $19,096 monthly.
MSC Engineer I with an estimated total pay of $93K - $123K/yr