ASML employees working as Senior Software Developer in US have attributed a compensation and benefits rating of 2.3 out of 5 stars, based on 33 ratings. This is 32% lower than the average of Senior Software Developer professionals at ASML worldwide.
The salary trajectory of a Senior Software Developer ranges between locations and employers. The salary starts at $121,359 per year (estimate) and goes up to $375,003 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Software Developer at ASML is $178,166 per year or $86 per hour, but some professionals have reported earning up to roughly $274,556 per year (90th percentile). The typical pay range is between $143,296 (25th percentile) and $224,462 (75th percentile) annually. This is based on 1 salaries submitted by ASML Senior Software Developer professionals on Glassdoor, as of Jul 2026.
Senior Software Developer professionals typically earn between $69 and $108 per hour.
Senior Software Developer professionals typically earn between $11,941 and $18,705 monthly.