ASML employees working as Senoir Software Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 39 ratings. This is 14% lower than the average of Senoir Software Engineer professionals at ASML worldwide.
The salary trajectory of a Senoir Software Engineer ranges between locations and employers. The salary starts at $150,766 per year (estimate) and goes up to $370,560 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senoir Software Engineer at ASML is $175,520 per year or $84 per hour, but some professionals have reported earning up to roughly $274,429 per year (90th percentile). The typical pay range is between $140,225 (25th percentile) and $222,958 (75th percentile) annually. This is based on 1 salaries submitted by ASML Senoir Software Engineer professionals on Glassdoor, as of Jul 2026.
Senoir Software Engineer professionals typically earn between $67 and $107 per hour.
Senoir Software Engineer professionals typically earn between $11,685 and $18,580 monthly.