ASML employees working as Sr. Software Engineer in US have attributed a compensation and benefits rating of 2.9 out of 5 stars, based on 39 ratings. This is 17% lower than the average of Sr. Software Engineer professionals at ASML worldwide.
The salary trajectory of a Sr. Software Engineer ranges between locations and employers. The salary starts at $153,711 per year (estimate) and goes up to $384,474 per year (estimate) for the highest level of seniority.
The estimated average salary for a Sr. Software Engineer at ASML is $211,358 per year or $102 per hour, but some professionals have reported earning up to roughly $338,515 per year (90th percentile). The typical pay range is between $166,639 (25th percentile) and $272,023 (75th percentile) annually. This is based on 15 salaries submitted by ASML Sr. Software Engineer professionals on Glassdoor, as of Jul 2026.
Sr. Software Engineer professionals typically earn between $80 and $131 per hour.
Sr. Software Engineer professionals typically earn between $13,887 and $22,669 monthly.