Lam Research employees working as Process Development Engineer III in US have attributed a compensation and benefits rating of 3.4 out of 5 stars, based on 19 ratings. This is in line with the average of Process Development Engineer III professionals at Lam Research worldwide.
The salary trajectory of a Process Development Engineer III ranges between locations and employers. The salary starts at $117,827 per year (estimate) and goes up to $237,989 per year (estimate) for the highest level of seniority.
The estimated average salary for a Process Development Engineer III at Lam Research is $159,955 per year or $77 per hour, but some professionals have reported earning up to roughly $233,363 per year (90th percentile). The typical pay range is between $132,736 (25th percentile) and $195,630 (75th percentile) annually. This is based on 2 salaries submitted by Lam Research Process Development Engineer III professionals on Glassdoor, as of Jul 2026.
Process Development Engineer III professionals typically earn between $64 and $94 per hour.
Process Development Engineer III professionals typically earn between $11,061 and $16,302 monthly.