How does the salary as Field Service Engineer at Onto Innovation compare with the base salary range for this job?

The average salary for Field Service Engineer is $104,493 per year (estimate) in US , which is 4% higher than the average Onto Innovation salary of $100,093 per year (estimate) for this job.

Are Field Service Engineer professionals at Onto Innovation in US satisfied with their compensation?

Onto Innovation employees working as Field Service Engineer in US have attributed a compensation and benefits rating of 2 out of 5 stars, based on 3 ratings. This is 23% lower than the average of Field Service Engineer professionals at Onto Innovation worldwide.

What is the salary trajectory of a Field Service Engineer?

The salary trajectory of a Field Service Engineer ranges between locations and employers. The salary starts at $104,493 per year (estimate) and goes up to $213,159 per year (estimate) for the highest level of seniority.

How much does a Field Service Engineer make at Onto Innovation?

The estimated average salary for a Field Service Engineer at Onto Innovation is $104,493 per year or $50 per hour, but some professionals have reported earning up to roughly $146,869 per year (90th percentile). The typical pay range is between $88,442 (25th percentile) and $125,208 (75th percentile) annually. This is based on 9 salaries submitted by Onto Innovation Field Service Engineer professionals on Glassdoor, as of Jul 2026.

What is the typical salary for a Field Service Engineer per hour?

Field Service Engineer professionals typically earn between $43 and $60 per hour.

What is the typical salary for a Field Service Engineer per month?

Field Service Engineer professionals typically earn between $7,370 and $10,434 monthly.

What is the pay for job titles similar to Field Service Engineer at Onto Innovation?

Field Service Engineer - with an estimated total pay of $86K - $118K/yr

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Onto Innovation

All Onto Innovation salaries

Total salary range for Onto Innovation Field Service Engineer

Total Pay

$86K

$118K_/yr

About our data

Last updated Apr 10, 20259 Salaries submitted

Pay breakdown

$100K

Median total pay

Base Pay

88.6%

$77K - $102K/yr

$89K/yrmedian

Bonus

$4K - $8K/yr

$6K/yrmedian

Profit Sharing

5.4%

$4K - $8K/yr

$5K/yrmedian

Deep dive into Pay

Recent salaries shared by Field Service Engineer at Onto Innovation

Job Title | Years of Experience

Base • Additional pay

Location

Date submitted

Job Title | Years of Experience

Location

Date submitted

Base • Additional pay

Field Service Engineer

10-14 years

$78K/yr

($73K • $5K)

Hillsboro, OR

submitted on Jul 27, 2024

$78K/yr

$73K • $5K

Field Service Engineer

4-6 years

$69K/yr

($69K • $0)

Milpitas, CA

submitted on Feb 9, 2024

$69K/yr

$69K • $0

Field Service Engineer

1-3 years

$101K/yr

($85K • $16K)

Hillsboro, OR

submitted on Nov 14, 2023

$101K/yr

$85K • $16K

Field Service Engineer

4-6 years

$87K/yr

($87K • $0)

Milpitas, CA

submitted on Sep 25, 2023

$87K/yr

$87K • $0

Field Service Engineer

4-6 years

$67K - $78K/yr

Bloomington, MN

submitted on Jun 7, 2022

$67K - $78K/yr

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Field Service Engineer

1-3 years

$102K/yr

($91K • $11K)

Milpitas, CA

submitted on Jun 1, 2022

$102K/yr

$91K • $11K

Field Service Engineer

1-3 years

$90K - $105K/yr

Milpitas, CA

submitted on Oct 17, 2021

$90K - $105K/yr

Field Service Engineer

15+ years

$74K - $86K/yr

Phoenix, AZ

submitted on Jun 24, 2021

$74K - $86K/yr

Field Service Engineer

1-3 years

$79K - $91K/yr

Milpitas, CA

submitted on Apr 14, 2021

$79K - $91K/yr

Viewing 1 - 9 of 9

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Onto Innovation

Total salary range for Onto Innovation Field Service Engineer

About our data

Pay breakdown

$100K

Recent salaries shared by Field Service Engineer at Onto Innovation

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Onto Innovation pay FAQs

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Total salary range for Onto Innovation Field Service Engineer

About our data

Pay breakdown

$100K

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Onto Innovation pay FAQs