Recent salaries shared by Senior Process Engineer at TSMC
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
Anonymously share your salary to help the community.
TSMC pay FAQs
- The average salary for Senior Process Engineer is $191,171 per year (estimate) in US, which is 17% higher than the average TSMC salary of $162,824 per year (estimate) for this job.
- TSMC employees working as Senior Process Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 5 ratings. This is 3% lower than the average of Senior Process Engineer professionals at TSMC worldwide.
- The salary trajectory of a Senior Process Engineer ranges between locations and employers. The salary starts at $117,783 per year (estimate) and goes up to $237,944 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Senior Process Engineer at TSMC is $191,171 per year or $92 per hour, but some professionals have reported earning up to roughly $284,309 per year (90th percentile). The typical pay range is between $157,180 (25th percentile) and $236,326 (75th percentile) annually. This is based on 24 salaries submitted by TSMC Senior Process Engineer professionals on Glassdoor, as of Jul 2026.
- Senior Process Engineer professionals typically earn between $76 and $114 per hour.
- Senior Process Engineer professionals typically earn between $13,098 and $19,694 monthly.